Measurement System Outline
On the cylindrical work edge surface, the cylindircal center standard is divided equally (2~12 portions) and the processed minute width groove shape or machining data data is measured.
Because the actual work groove width 0.8~2.0mm is very small, measurement that is not possible with general purpose 3 dimensional measuring equipment is performed automatically and accurately using special precision positioning stage and 32 bit computer. Also using sensing mechanism and special feeler and 2 pcs of 0.1μm resolution sensors, due to automatic correction computing, high precision measurement that reduces feeler deflection and error is performed and the measurement accuracy guarranteed.
Specification Outline
1 ) General Specifications
- Power AC100V±5%, 50/60Hz, 200VA
- Air Source 5kg/cm2 ~ 9kg/cm2 Clean air
- Use Environment Room
- Temperature : 20°C±5°C
- Humidity : 80%RH and below
2 ) Accuracy Warranty
- Groove Width : ±1μm and below
- Groove Width Parallellism : 1μm and below
- Groove Width Squareness : 1μm and below
- Groove Partition Angle : ±30 Angle seconds
- Groove Inclination Angle : ±1 degre
- Shape diagram :
(Lateral Magnification×20，×50 selection)
(Vertical Magnification×200，×500 selection)
(Inclination Angle Correction Enable/Disable Selection)
